Low-temperature Plasmas

Our low-temperature plasma research develops solutions for global challenges in high-tech manufacturing, environment, and medicine, through coupling advanced plasma sensing with simulations.

About the Research Area

Low-temperature plasmas (LTPs) have the ability to generate and deliver reactive atomic and molecular species, UV, charged particles, and electric fields to biological targets under ambient conditions. LTPs can stimulate specific biological responses by producing Reactive Oxygen and Nitrogen Species (RONS), which mediate many physiological processes such as cell-to-cell signalling, immune response, wound healing, and cell death. These plasma-produced species are expected to mimic the functions of their native counterparts and offer unique synergies capable of stimulating specific biological responses. Our research focuses on understanding the plasma-driven mechanisms of action and engineering controllable plasma delivery strategies to enhance clinical therapies. We collaborate with many partners on this theme.

Low-temperature Plasmas Publications

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Experimental investigation of power deposition and ionization kinetics in an inductively coupled discharge. Rullenraad, W; Crowley, B; Turner, M.M; Vender, D. IEEE International Conference on Plasma Science 2000

Anomalous skin effect and collisionless power dissipation in inductively coupled discharges. Cunge, G; Crowley, B; Vender, D; Turner, M.M. Journal of Applied Physics 2001

Determination of quenching coefficients in a hydrogen RF discharge by time-resolved optical emission spectroscopy. Gans, T; Lin, C.C; Schulz-Von Der Gathen, V; Döbele, H.F. Journal of Physics D: Applied Physics 2001

Use of plasma impedance monitoring for the determination of sf6 reactive ion etch process end points in a sio2/si system. Dewan, M.N.A; McNally, P.J; Perova, T; Herbert, P.A.F. Materials Research Innovations 2001

Standing wave and skin effects in large area, high frequency capacitive discharges. Lieberman, M.A; Booth, J.-P; Chabert, P; Rax, J.-M; Turner, M.M. IEEE International Conference on Plasma Science 2002

Determination of SF6 reactive ion etching end point of the SiO2/Si system by plasma impedance monitoring. Dewan, M.N.A; McNally, P.J; Perova, T; Herbert, P.A.F. Microelectronic Engineering 2002

Collisionless heating by capacitive radio frequency sheaths. Gozadinos, G; Turner, M.M; Vender, D. IEEE International Conference on Plasma Science 2002

Measurement of quenching coefficients and development of calibration methods for quantitative spectroscopy of plasmas at elevated pressures. Francis, A; Gans, T; Niemi, K; Czarnetzki, U; Schulz-von der Gathen, V; Döbele, H.F. Proceedings of SPIE – The International Society for Optical Engineering 2002

Standing wave and skin effects in large-area, high-frequency capacitive discharges. Lieberman, M.A; Booth, J.P; Chabert, P; Rax, J.M; Turner, M.M. Plasma Sources Science and Technology 2002

Phase-resolved emission spectroscopy of a hydrogen rf discharge for the determination of quenching coefficients. Gans, T; Lin, C.C; Schulz–von der Gathen, V; Döbele, H.F. Physical Review A – Atomic, Molecular, and Optical Physics 2003

H- to W-mode transitions and properties of a multimode helicon plasma reactor. Kinder, R.L; Ellingboe, A.R; Kushner, M.J. Plasma Sources Science and Technology 2003

Erratum: H- to W-mode transitions and properties of a multimode helicon plasma reactor (Plasma Sources Science and Technology (2003) 12 (561-75)). Kinder, R.L; Ellingboe, A.R; Kushner, M.J. Plasma Sources Science and Technology 2004

Electrostatic modelling of dual frequency rf plasma discharges. Boyle, P.C; Ellingboe, A.R; Turner, M.M. Plasma Sources Science and Technology 2004

Prospects of phase resolved optical emission spectroscopy as a powerful diagnostic tool for RF-discharges. Gans, T; Schulz-von Der Gathen, V; Döbele, H.F. Contributions to Plasma Physics 2004

Analysis of the excited argon atoms in the GEC RF reference cell by means of one-dimensional PIC simulations. Lauro-Taroni, L; Turner, M.M; Braithwaite, N.St.J. Journal of Physics D: Applied Physics 2004