Experimental investigation of power deposition and ionization kinetics in an inductively coupled discharge. Rullenraad, W; Crowley, B; Turner, M.M; Vender, D. IEEE International Conference on Plasma Science 2000

Leave a Reply

Your email address will not be published. Required fields are marked *

Fill out this field
Fill out this field
Please enter a valid email address.
You need to agree with the terms to proceed