Low-temperature Plasmas

Our low-temperature plasma research develops solutions for global challenges in high-tech manufacturing, environment, and medicine, through coupling advanced plasma sensing with simulations.

About the Research Area

Low-temperature plasmas (LTPs) have the ability to generate and deliver reactive atomic and molecular species, UV, charged particles, and electric fields to biological targets under ambient conditions. LTPs can stimulate specific biological responses by producing Reactive Oxygen and Nitrogen Species (RONS), which mediate many physiological processes such as cell-to-cell signalling, immune response, wound healing, and cell death. These plasma-produced species are expected to mimic the functions of their native counterparts and offer unique synergies capable of stimulating specific biological responses. Our research focuses on understanding the plasma-driven mechanisms of action and engineering controllable plasma delivery strategies to enhance clinical therapies. We collaborate with many partners on this theme.

Low-temperature Plasmas Publications

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Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges. Sharma, S; Sirse, N; Sen, A; Turner, M.M; Ellingboe, A.R. Physics of Plasmas 2019

Electric field filamentation and higher harmonic generation in very high frequency capacitive discharges. Sharma, S; Sirse, N; Sen, A; Wu, J.S; Turner, M.M. Journal of Physics D: Applied Physics 2019

Investigation of etching optimization in capacitively coupled SF6-O2 plasma. Alshaltami, K.A; Daniels, S. AIP Advances 2019

Effects of excitation voltage pulse shape on the characteristics of atmospheric-pressure nanosecond discharges. Donkó, Z; Hamaguchi, S; Gans, T. Plasma Sources Science and Technology 2019

Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge. Babu, S.K; Kelly, S; Kechkar, S; Swift, P; Daniels, S; Turner, M.M. Plasma Sources Science and Technology 2019

Spatial temperature profile in a magnetised capacitively coupled discharge. Binwal, S; Joshi, J.K; Karkari, S.K; Kaw, P.K; Nair, L; Leggate, H; Somers, A; Turner, M.M. Walailak Journal of Science and Technology 2019

Nitrogen reactive ion etch processes for the selective removal of poly-(4-vinylpyridine) in block copolymer films. Flynn, S.P; Bogan, J; Lundy, R; Khalafalla, K.E; Shaw, M; Rodriguez, B.J; Swift, P; Daniels, S; O’Connor, R; Hughes, G; Kelleher, S.M. Nanotechnology 2018

Chemical kinetics in an atmospheric pressure helium plasma containing humidity. Schröter, S; Wijaikhum, A; Gibson, A.R; West, A; Davies, H.L; Minesi, N; Dedrick, J; Wagenaars, E; De Oliveira, N; Nahon, L; Kushner, M.J; Booth, J.-P; Niemi, K; Gans, T; O’Connell, D. Physical Chemistry Chemical Physics 2018

Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge. Sharma, S; Sirse, N; Turner, M.M; Ellingboe, A.R. Physics of Plasmas 2018

Nontarget Biomolecules Alter Macromolecular Changes Induced by Bactericidal Low-Temperature Plasma. Privat-Maldonado, A; Gorbanev, Y; O’Connell, D; Vann, R; Chechik, V; Van Der Woude, M.W. IEEE Transactions on Radiation and Plasma Medical Sciences 2018

Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge. Sharma, S; Sen, A; Sirse, N; Turner, M.M; Ellingboe, A.R. Physics of Plasmas 2018

Numerical study of the influence of surface reaction probabilities on reactive species in an rf atmospheric pressure plasma containing humidity. Schröter, S; Gibson, A.R; Kushner, M.J; Gans, T; O’Connell, D. Plasma Physics and Controlled Fusion 2018

Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N 2 mixtures. Bischoff, L; Hübner, G; Korolov, I; Donkó, Z; Hartmann, P; Gans, T; Held, J; Schulz-Von Der Gathen, V; Liu, Y; Mussenbrock, T; Schulze, J. Plasma Sources Science and Technology 2018

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. Donkó, Z; Derzsi, A; Korolov, I; Hartmann, P; Brandt, S; Schulze, J; Berger, B; Koepke, M; Bruneau, B; Johnson, E; Lafleur, T; Booth, J.-P; Gibson, A.R; O’Connell, D; Gans, T. Plasma Physics and Controlled Fusion 2018

Calculated electron impact dissociation cross sections for molecular chlorine (Cl2). Hamilton, J.R; Tennyson, J; Booth, J.-P; Gans, T; Gibson, A.R. Plasma Sources Science and Technology 2018

Electronegative plasma diagnostic by laser photo-detachment combined with negatively biased Langmuir probe. Oudini, N; Sirse, N; Taccogna, F; Ellingboe, A.R; Bendib, A. Physics of Plasmas 2018

Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology. Mozetič, M; Vesel, A; Primc, G; Eisenmenger-Sittner, C; Bauer, J; Eder, A; Schmid, G.H.S; Ruzic, D.N; Ahmed, Z; Barker, D; Douglass, K.O; Eckel, S; Fedchak, J.A; Hendricks, J; Klimov, N; Ricker, J; Scherschligt, J; Stone, J; Strouse, G; Capan, I; Buljan, M; Milošević, S; Teichert, C; Cohen, S.R; Silva, A.G; Lehocky, M; Humpoliček, P; Rodriguez, C; Hernandez-Montelongo, J; Mercier, D; Manso-Silván, M; Ceccone, G; Galtayries, A; Stana-Kleinschek, K; Petrov, I; Greene, J.E; Avila, J; Chen, C.Y; Caja-Munoz, B; Yi, H; Boury, A; Lorcy, S; Asensio, M.C; Bredin, J; Gans, T; O’Connell, D; Brendin, J; Reniers, F; Vincze, A; Anderle, M; Montelius, L. Thin Solid Films 2018

The 2017 Plasma Roadmap: Low temperature plasma science and technology. Adamovich, I; Baalrud, S.D; Bogaerts, A; Bruggeman, P.J; Cappelli, M; Colombo, V; Czarnetzki, U; Ebert, U; Eden, J.G; Favia, P; Graves, D.B; Hamaguchi, S; Hieftje, G; Hori, M; Kaganovich, I.D; Kortshagen, U; Kushner, M.J; Mason, N.J; Mazouffre, S; Thagard, S.M; Metelmann, H.-R; Mizuno, A; Moreau, E; Murphy, A.B; Niemira, B.A; Oehrlein, G.S; Petrovic, Z.L; Pitchford, L.C; Pu, Y.-K; Rauf, S; Sakai, O; Samukawa, S; Starikovskaia, S; Tennyson, J; Terashima, K; Turner, M.M; Van De Sanden, M.C.M; Vardelle, A. Journal of Physics D: Applied Physics 2017

Concepts, Capabilities, and Limitations of Global Models: A Review. Hurlbatt, A; Gibson, A.R; Schröter, S; Bredin, J; Foote, A.P.S; Grondein, P; O’Connell, D; Gans, T. Plasma Processes and Polymers 2017

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges. Derzsi, A; Bruneau, B; Gibson, A.R; Johnson, E; O’Connell, D; Gans, T; Booth, J.-P; Donkó, Z. Plasma Sources Science and Technology 2017

Silicon nitride deposition for flexible organic electronic devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source. Kim, K.S; Kim, K.H; Ji, Y.J; Park, J.W; Shin, J.H; Ellingboe, A.R; Yeom, G.Y. Scientific Reports 2017

Investigation of the electron kinetics in O2 capacitively coupled plasma with the use of a Langmuir probe. Kechkar, S; Swift, P; Kelly, S; Kumar, S; Daniels, S; Turner, M. Plasma Sources Science and Technology 2017

Controlled production of atomic oxygen and nitrogen in a pulsed radio-frequency atmospheric-pressure plasma. Dedrick, J; Schröter, S; Niemi, K; Wijaikhum, A; Wagenaars, E; De Oliveira, N; Nahon, L; Booth, J.P; O’Connell, D; Gans, T. Journal of Physics D: Applied Physics 2017

Absolute ozone densities in a radio-frequency driven atmospheric pressure plasma using two-beam UV-LED absorption spectroscopy and numerical simulations. Wijaikhum, A; Schröder, D; Schröter, S; Gibson, A.R; Niemi, K; Friderich, J; Greb, A; Schulz-Von Der Gathen, V; O’Connell, D; Gans, T. Plasma Sources Science and Technology 2017

Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation. Gibson, A.R; Gans, T. Plasma Sources Science and Technology 2017

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas. Gibson, A.R; Foucher, M; Marinov, D; Chabert, P; Gans, T; Kushner, M.J; Booth, J.-P. Plasma Physics and Controlled Fusion 2017

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials. Tsutsumi, T; Greb, A; Gibson, A.R; Hori, M; O’Connell, D; Gans, T. Journal of Applied Physics 2017