Prospects of phase resolved optical emission spectroscopy as a powerful diagnostic tool for RF-discharges. Gans, T; Schulz-von Der Gathen, V; Döbele, H.F. Contributions to Plasma Physics 2004
Transient enhanced diffusion and deactivation of ion-implanted As in strained Si. Dilliway, G.D.M; Smith, A.J; Hamilton, J.J; Benson, J; Xu, L; McNally, P.J; Cooke, G; Kheyrandish, H; Cowern, N.E.B. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 2005
Synchrotron X-ray topographic study of dislocations and stacking faults in InAs. Lankinen, A; Tuomi, T; Riikonen, J; Knuuttila, L; Lipsanen, H; Sopanen, M; Danilewsky, A; McNally, P.J; O’Reilly, L; Zhilyaev, Y; Fedorov, L; Sipilä, H; Vaijärvi, S; Simon, R; Lumb, D; Owens, A. Journal of Crystal Growth 2005
Geometric linewidth and the impact of thermal processing on the stress regimes induced by electroless copper metallization for Si integrated circuit interconnect technology. McNally, P.J; Kanatharana, J; Toh, B.H.W; McNeill, D.W; Danilewsky, A.N; Tuomi, T; Knuuttila, L; Riikonen, J; Toivonen, J; Simon, R. Journal of Applied Physics 2004