Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma. Greb, A; Gibson, A.R; Niemi, K; O’Connell, D; Gans, T. Plasma Sources Science and Technology 2015
Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: Comparison of Ar, H2 and CF4. Bruneau, B; Lafleur, T; Gans, T; O’Connell, D; Greb, A; Korolov, I; Derzsi, A; Donkó, Z; Brandt, S; Schüngel, E; Schulze, J; Diomede, P; Economou, D.J; Longo, S; Johnson, E; Booth, J.-P. Plasma Sources Science and Technology 2015
Control and enhancement of the oxygen storage capacity of ceria films by variation of the deposition gas atmosphere during pulsed DC magnetron sputtering. Eltayeb, A; Vijayaraghavan, R.K; McCoy, A; Venkatanarayanan, A; Yaremchenko, A.A; Surendran, R; McGlynn, E; Daniels, S. Journal of Power Sources 2015
Atomic oxygen treatment of carbon containing low-k dielectric materials to facilitate manganese silicate barrier formation. Bogan, J; McCoy, A.P; Byrne, C; O’Connor, R; Hughes, G. 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015 2015