Electron density, optical emission spectroscopy and fluorocarbon deposition rate measurements in a high density inductively coupled C4F 8 plasma
A multi-tile-electrode plasma source for large-area negative-ion production for neutral beam heating of ITER
A differentially pumped hollow cathode constricted anode plasma source for the production of negative ions
Effects of Ar and O2 additives on photopatternable sol-gel etching in an SF6-based plasma for planar lightwave circuit fabrication
Interaction of Plasma deposited HMDSO-based coatings with Fibrinogen and human blood plasma: The correlation between bulk plasma, surface characteristics and biomolecule interaction