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Micro-Raman Spectroscopy Evaluation of the Local Mechanical Stress in Shallow Trench Isolation CMOS Structures: Correlation With Defect Generation and Diode Leakage. De Wolf, I; Groeseneken, G; Maes, H.E; Bolt, M; Barla, K; Reader, A; McNally, P.J. Conference Proceedings from the International Symposium for Testing and Failure Analysis 1998