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A 2-D scalable, VHF/UHF compatible, capacitively coupled plasma source for large-area applicaiton. Ellingboe, A.R; Gaman, C; Ofarrell, D; Green, F; OHara, N; Ryan, K; Monaghan, E; Gilmore, T; Rudden, T; Michna, T. 37th EPS Conference on Plasma Physics 2010, EPS 2010 2010