Alshaltami, KA; Daniels, S. Investigation of etching optimization in capacitively coupled SF6-O-2 plasma. AIP Advances, 9(3), Article 35047. DOI: 10.1063/1.5066286
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action or later. Please see Debugging in WordPress for more information. (This message was added in version 6.7.0.) in /var/www/vhosts/ncpst.ie/httpdocs/wp-includes/functions.php on line 6114Alshaltami, KA; Daniels, S. Investigation of etching optimization in capacitively coupled SF6-O-2 plasma. AIP Advances, 9(3), Article 35047. DOI: 10.1063/1.5066286