Electron and negative ion dynamics in a pulsed 100 MHz capacitive discharge produced in an O-2 and Ar/O-2/C4F8 gas mixture - NCPST

Sirse, N; Tsutsumi, T; Sekine, M; Hori, M; Ellingboe, AR. Electron and negative ion dynamics in a pulsed 100 MHz capacitive discharge produced in an O-2 and Ar/O-2/C4F8 gas mixture. Plasma Sources Science & Technology, 29(3), Article 35025. DOI: 10.1088/1361-6595/ab7086