Harvey, C; Sirse, N; Gaman, C; Ellingboe, AR. Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma. Physics of Plasma, 27(11), Article 110701. DOI: 10.1063/5.0022844
Harvey, C; Sirse, N; Gaman, C; Ellingboe, AR. Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma. Physics of Plasma, 27(11), Article 110701. DOI: 10.1063/5.0022844